JPH042991Y2 - - Google Patents

Info

Publication number
JPH042991Y2
JPH042991Y2 JP115985U JP115985U JPH042991Y2 JP H042991 Y2 JPH042991 Y2 JP H042991Y2 JP 115985 U JP115985 U JP 115985U JP 115985 U JP115985 U JP 115985U JP H042991 Y2 JPH042991 Y2 JP H042991Y2
Authority
JP
Japan
Prior art keywords
shutter
irradiated
ultraviolet
irradiation
ultraviolet lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP115985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61118634U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP115985U priority Critical patent/JPH042991Y2/ja
Publication of JPS61118634U publication Critical patent/JPS61118634U/ja
Application granted granted Critical
Publication of JPH042991Y2 publication Critical patent/JPH042991Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP115985U 1985-01-08 1985-01-08 Expired JPH042991Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP115985U JPH042991Y2 (en]) 1985-01-08 1985-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP115985U JPH042991Y2 (en]) 1985-01-08 1985-01-08

Publications (2)

Publication Number Publication Date
JPS61118634U JPS61118634U (en]) 1986-07-26
JPH042991Y2 true JPH042991Y2 (en]) 1992-01-31

Family

ID=30473652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP115985U Expired JPH042991Y2 (en]) 1985-01-08 1985-01-08

Country Status (1)

Country Link
JP (1) JPH042991Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132198A (ko) * 2018-05-18 2019-11-27 삼성전자주식회사 다중 경화 장치 및 다중 경화 장치를 이용한 반도체 칩의 제조 방법

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743679Y2 (ja) * 1988-02-15 1995-10-09 株式会社日立メデイコ エックス線照射装置
JP2578256Y2 (ja) * 1991-12-16 1998-08-06 ウシオ電機株式会社 光ファイバーに塗布されたコーティング剤の硬化装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132198A (ko) * 2018-05-18 2019-11-27 삼성전자주식회사 다중 경화 장치 및 다중 경화 장치를 이용한 반도체 칩의 제조 방법

Also Published As

Publication number Publication date
JPS61118634U (en]) 1986-07-26

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